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Indian Institute of Technology (IIT) Roorkee 
CMOS Compatible Micro-machined Piezoelectric Energy Harvester 
Sanjeev Manhasa , M.M. Joglekarb , Sandeep Singh Chauhana 
Indian Institute of Technology (IIT) Roorkee 
Application type:
Applied - 2019-05-22 
Application Number:
Applied at:
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Indian Institute of Technology (IIT) Roorkee 
The present invention provides design, fabrication and characterization ofa cantilever based vibrational piezoelectric energy harvester (PEH). A new analytical model is developed and the dimension of unimorph PEH with proof mass is optimized. Using this model and methodology, it is shown that cantilever to harvester length and cantilever to proof mass width ratios should be optimum for the maximum power from the PEH for the PEHs fabricated using CMOS Compatible micromachining techniques by the novel scheme. The obtained high power density is attributed to the optimized dimensions of PEHs, the high piezoelectric coefficient (d31) of AlN film due to the use of composite bottom electrode stacks using Au as an interlayer. 

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