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Equipment Info
Focused Ion Beam Scanning Electron Microscope (FIBSEM)
Equipment Code : 2736841
Make : Thermo Fisher Scientific
Model : HELIOS 5 UC
Institution : Sophisticated Analytical Instrument Facilities (SAIF) IIT Bombay
Department : SAIF
Funding Agency Details : DST, Govt. of India
Pooling of Equipment slot : No
Last AMC Done :
Reference Website : www.saif.iitb.ac.in
Description : The Helios 5 UC model combines the Scanning Electron Beam (SEM) and the Focused Ion Beam (FIB) in order to achieve analysis at nano-scale resolution. The instrument is equipped with different detectors, GIS systems and micromanipulator which make it ideal for to perform high-resolution imaging, nano-patterning, material deposition, milling, TEM lamella preparation etc. Thermo Fischer Scientific UltraDry EDS Detector ; 100mm² active detection area ; Norvar Window with proprietary evacuated tube design for detection sensitivity to Be ; 129eV resolution at Mn K-alpha
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SEM Imaging / EDS Analysis
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TEM Lamella preparation (Mini 4 hours to be booked)
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FIB Patterning (Min 2 hours to be booked)
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FIB Slice & View
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