Equipment Info

Field Emission Scanning Electron Microscope with ED EBSD and Lithography

Equipment Info

Equipment Code : 3226682

Make : Carl Zeiss

Model : Gemini SEM 300

Institution : Indian Institute of Technology (IIT) Palakkad

Department : Central Instrumentation Facility

Funding Agency Details : Ministry of Education

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : To examine metallic/non-metallic specimens’ microstructure at 2000000 X magnification with the resolution of 0.8nm at 15 kV; 1.3 nm at 1 kV EDS (EDAX-make) attachment to detect its chemical composition EBSD (EDAX-make) attachment to analyse the texture (orientation) of microstructure of metallic components Lithography - Raith Lithography system (ELPHY Multibeam 20 MHz ) with Zeiss Electrostatic beam blanker attachment for electronic micro device fabrication

Usage Rate: (as indicated by the custodian/host institution)


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