Equipment Info

Optical Lithography System

Equipment Info

Equipment Code : 2729577

Make : Microtech srl

Model : LW405B Standard

Institution : Indian Institute of Science Education and Research (IISER) Pune

Department : Physics

Funding Agency Details : 0

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : 1. Laser Writer - Model LW405B Standard Laser : 1 Set, Lithograhy System, model LaserWriter LW405B Standard, with 150mm x 150mm patterning area, 405 nm GaN laser, XY laser interferometer. Including i) Front –back wafer alignment – 01 Nos ii) Vaccum Switch - 01 Nos iii)Operator table a) Stainless Steel – 01 Nos b) Light – 01 Nos : 1 Set, 2. Coprocessing unit : 1 Nos, 3200.00EURO, 3. Automated final lens changer : 1 Nos, 6000.00EURO. Note : The Laserwriter should be supplied with operating manual, interconnect schematic, labels for plugs and any necessary instructions for system installation and operation Microtech s.r.lCorso Pisani, 2290129 Palermo, Italy

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available