I-STEM Logo
Principal Sciencefic Logo

Equipment Info

Electron Beam Lithography

Equipment Info

Equipment Code : 2729578

Make : Raith GmbH

Model : ELPHY Plus

Institution : Indian Institute of Science Education and Research (IISER) Pune

Department : Physics

Funding Agency Details : 0

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : 1) ELPHY Plus lithography system 6 MHz Advanced SEM/FIB nanolithography system ELPHY Plus Hard- and Software for Windows XP, Dedicated Pattern Generator Hardware in DSP technology comprising: - 400 MHz Digital Signal Processor unit - 6 MHz max. writing speed with <2ns dwelltime control - 2 x high speed DACs (16 bit, 25 MHz bandwidth, deglitched) for X and Y main beam deflection - 6 multiplying 16-bit DACs for overlay alignment and write field calibration with sub-nm step size control - All DACs are thermally stabilized and rf noise shielded - Synchronized beamblanker control circuit, TTL output - 1 x Video ADC with 14 bit, 360ns min pixel acquisition time - connection cables to SEM or FIB and Raith PC (SEM or FIB model must be specified) ELPHY Pattern Generation Software Suite in 32 bit architecture - multi-user management: separate design and parameter files for each user - hierarchical GDSII CAD editor with large file handling capability - data import formats DXF

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available

The Indian Science, Technology, and Engineering facilities Map (I-STEM) is an interactive web portal designed to accelerate scientific progress in India. This initiative, conceived and supported by the Office of the Principal Scientific Adviser to the Government of India, creates a centralized platform for sharing publicly funded R&D equipment and facilities across various institutions throughout the country.

Resources

 

  • Visitor Hit Counter

 

Copyright © 2026 I-STEM. All rights reserved Hosted at the National Informatics Centre, Delhi, India Audited by: STQC Bengaluru as on 26 Sep 2024