Equipment Info

Mask Aligner System

Equipment Info

Equipment Code : 333941

Make : ABM USA Inc USA

Model :

Institution : Punjab Engineering College (PEC) Chandigarh

Department : Electronics and Communication Engineering

Funding Agency Details : 0

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : o Ability to do patterning/lithography with semi-automatic capability o Minimum feature size of 0.8 µm o Can handle substrates up to 3 inch diameter o Ability to process mask sizes from 2.5”x2.5” up to 5”x5”. o Split-field dual CCD camera with continuos video zoom with magnification up to 900X

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit hour) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available