Equipment Info

RF Sputter System

Equipment Info

Equipment Code : 038464

Make : Excel Instruments

Model : 2023

Institution : SRM University AP Andhra Pradesh Guntur

Department : Physics

Funding Agency Details : Institution Funding (Self Supported)

Pooling of Equipment slot :   Yes

AMC End Date (Valid Till) :  

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PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : Radiofrequency (RF) sputtering is a Physical Vapor Deposition (PVD) method that uses a high voltage alternating current (AC) power source to send radio waves through the vacuum chamber and create positively charged sputtering gas. RF magnetron sputtering or magnetron sputter deposition is a type of

Usage Rate: (as indicated by the custodian/host institution)


Samples External Academic User Internal Academic User Industry User Start-ups National Research Lab User Grassroot innovator
Up to 5 X 5 cm Substrate
4 inch dia wafer

Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available