Equipment Info

MASKLESS LITHOGRAPHY

Equipment Info

Equipment Code : 1947222

Make : HEIDELBERG

Model : mMLA

Institution : Indian Institute of Technology (IIT) Kharagpur

Department :

Funding Agency Details : MeitY, Govt. of India

Pooling of Equipment slot : No

AMC End Date (Valid Till) :

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : The Heidelberg mMLA HI1536 is a high-resolution, direct-write Maskless Lithography System designed for rapid prototyping and low-volume microfabrication without the need for photomasks. Key Features: Resolution: Down to 1 micro m feature size Substrate Compatibility: Silicon wafers, glass, quartz, flexible substrates, and more (up to 6-inch wafers) Alignment Accuracy: <500 nm with global and local alignment capabilities Exposure Mode: Grayscale and binary patterning Software Interface: User-friendly GUI for CAD file import (e.g., GDSII, DXF) Applications: Microfluidics, photonic devices, MEMS, sensors, and research in micro/nanofabrication

Usage Rate: (as indicated by the custodian/host institution)

S.No.	Users Category	Rate (unit ) & (In Rupees)
1	Academic (External)*
2	Academic (Internal)***
3	Grassroot innovator
4	Industry User
5	National Research Lab User
6	Startup/MSME User

Accessories / Consumables / Spare parts / Testing modes

Sample Name	Sample Type	Sample UOM	Sample Availability	Unit Cost	Sample Quantity	Sample Description
No Data Available

The Indian Science, Technology, and Engineering facilities Map (I-STEM) is an interactive web portal designed to accelerate scientific progress in India. This initiative, conceived and supported by the Office of the Principal Scientific Adviser to the Government of India, creates a centralized platform for sharing publicly funded R&D equipment and facilities across various institutions throughout the country.

Resources

18004253281 (customer care)
support@istem.co.in

Indian Science Technology and Engineering facilities Map

Indian Science Technology and Engineering facilities Map

MASKLESS LITHOGRAPHY

Equipment Info

Equipment Code : 1947222

Make : HEIDELBERG

Model : mMLA

Institution : Indian Institute of Technology (IIT) Kharagpur

Department :

Funding Agency Details : MeitY, Govt. of India

Pooling of Equipment slot : No

AMC End Date (Valid Till) :

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Usage Rate: (as indicated by the custodian/host institution)

Accessories / Consumables / Spare parts / Testing modes

Resources

Indian Science Technology and Engineering facilities Map

Indian Science Technology and Engineering facilities Map

MASKLESS LITHOGRAPHY

Equipment Info

Equipment Code : 1947222

Make : HEIDELBERG

Model : mMLA

Institution : Indian Institute of Technology (IIT) Kharagpur

Department :

Funding Agency Details : MeitY, Govt. of India

Pooling of Equipment slot : No

AMC End Date (Valid Till) :

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Usage Rate: (as indicated by the custodian/host institution)

Accessories / Consumables / Spare parts / Testing modes

Acknowledgement Statement For Equipment users:

Acknowledgement Statement For Equipment users:

Resources