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Equipment Info
Plasma Asher
Equipment Code : 2747282
Make : ULTECH
Model : EURA-100
Institution : Indian Institute of Technology (IIT) Bombay
Department : Centre for Sophisticated Instruments and Facilities
Funding Agency Details :
Pooling of Equipment slot : No
Last AMC Done :
Reference Website : https://instruments.iitb.ac.in/plasma-asher-0
Description : The Plasma Asher tool used in semiconductor micro and nanofabrication for surface cleaning, material removal, and photoresist stripping through plasma ashing, a dry process that removes the organic materials from substrates.
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