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Equipment Info
Plasma Asher
Equipment Code : 2747282
Make : ULTECH
Model : EURA-100
Institution : Indian Institute of Technology (IIT) Bombay
Department : Centre for Sophisticated Instruments and Facilities
Funding Agency Details :
Pooling of Equipment slot : No
AMC End Date (Valid Till) :
PRISM Service Category (About PRISM) : D
Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :
Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :
Equipment Certification (if any) (No document available):
Equipment Calibration (if any) (No document available):
Remarks / Special Instructions (if any):
Description : The Plasma Asher tool used in semiconductor micro and nanofabrication for surface cleaning, material removal, and photoresist stripping through plasma ashing, a dry process that removes the organic materials from substrates.
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