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Equipment Info
High throughput E-beam Lithography system
Equipment Code : 2747283
Make : Raith GmbH
Model : VOYAGER, Model no. 18011
Institution : Indian Institute of Technology (IIT) Bombay
Department : Centre for Sophisticated Instruments and Facilities
Funding Agency Details :
Pooling of Equipment slot : No
Last AMC Done :
Reference Website : https://instruments.iitb.ac.in/high-throughput-e-beam-lithography-system
Description : The VOYAGER system by Raith is an advanced electron beam lithography (EBL) tool designed for high-resolution patterning and precise nanofabrication. It is typically used in semiconductor device fabrication requiring nanoscale patterning.
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Note:
i) Academic (External) means researchers belongs to the other institution.
ii) Academic (Internal but different department/lab) means researchers belongs to other department/lab or other investigators.
iii) Academic (Internal) means researchers belongs to the same institution.
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