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Equipment Info
Standalone Rapid thermal processing
Equipment Code : 2747289
Make : Annealsys
Model : Annealsys AS-one 100
Institution : Indian Institute of Technology (IIT) Bombay
Department : Centre for Sophisticated Instruments and Facilities
Funding Agency Details :
Pooling of Equipment slot : No
Last AMC Done :
Reference Website : https://instruments.iitb.ac.in/standalone-rapid-thermal-processing
Description : The rapid thermal processor has the capability to run the following processes (a) Rapid thermal annealing of compound semiconductors (b) Rapid Thermal Oxidation (RTO) (c) Rapid Thermal Nitridation (RTN)
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RTP Group IV
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