Equipment Info

Standalone Rapid thermal processing

Equipment Info

Equipment Code : 2747289

Make : Annealsys

Model : Annealsys AS-one 100

Institution : Indian Institute of Technology (IIT) Bombay

Department : Centre for Sophisticated Instruments and Facilities

Funding Agency Details : Ministry of Education or IoE Funding and MEITY

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : The rapid thermal processor has the capability to run the following processes (a) Rapid thermal annealing of compound semiconductors (b) Rapid Thermal Oxidation (RTO) (c) Rapid Thermal Nitridation (RTN)

Usage Rate: (as indicated by the custodian/host institution)


Samples External Academic User Internal Academic User Industry User Start-ups National Research Lab User Grassroot innovator
RTP Group IV

Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available