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Equipment Info
Standalone Rapid thermal processing
Equipment Code : 2747289
Make : Annealsys
Model : Annealsys AS-one 100
Institution : Indian Institute of Technology (IIT) Bombay
Department : Centre for Sophisticated Instruments and Facilities
Funding Agency Details :
Pooling of Equipment slot : No
AMC End Date (Valid Till) :
PRISM Service Category (About PRISM) :
Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :
Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :
Equipment Certification (if any):
Equipment Calibration (if any):
Remarks / Special Instructions (if any):
Description : The rapid thermal processor has the capability to run the following processes (a) Rapid thermal annealing of compound semiconductors (b) Rapid Thermal Oxidation (RTO) (c) Rapid Thermal Nitridation (RTN)
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RTP Group IV
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