Equipment Info

Inductively Coupled Plasma Reactive Ion Etching

Equipment Info

Equipment Code : 548410

Make : Sentech

Model : SI500

Institution : Indian Institute of Technology (IIT) Roorkee

Department : Department of Physics

Funding Agency Details : DST, Govt. of India

Pooling of Equipment slot : Yes

AMC End Date (Valid Till) :

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : The SENTECH SI 500 ICP-RIE is a high-end plasma etch system that utilizes an ICP source with low ion energy for low-damage etching and precise nanostructuring. It features a compact vacuum load lock, supports wafers up to 200?mm, and offers a substrate temperature range from –20?°C to 250?°C. Available Gases: N2, He, O2, CF4, SF6, CHF3, Ar, CH4, H2, and C4F8.

Usage Rate: (as indicated by the custodian/host institution)

Samples	External Academic User	Internal Academic User	Industry User	Start-ups	National Research Lab User	Grassroot innovator
Per hour charges

Accessories / Consumables / Spare parts / Testing modes

Sample Name	Sample Type	Sample UOM	Sample Availability	Unit Cost	Sample Quantity	Sample Description
No Data Available

The Indian Science, Technology, and Engineering facilities Map (I-STEM) is an interactive web portal designed to accelerate scientific progress in India. This initiative, conceived and supported by the Office of the Principal Scientific Adviser to the Government of India, creates a centralized platform for sharing publicly funded R&D equipment and facilities across various institutions throughout the country.

Resources

18004253281 (customer care)
support@istem.co.in

Indian Science Technology and Engineering facilities Map

Indian Science Technology and Engineering facilities Map

Inductively Coupled Plasma Reactive Ion Etching

Equipment Info

Equipment Code : 548410

Make : Sentech

Model : SI500

Institution : Indian Institute of Technology (IIT) Roorkee

Department : Department of Physics

Funding Agency Details : DST, Govt. of India

Pooling of Equipment slot : Yes

AMC End Date (Valid Till) :

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Usage Rate: (as indicated by the custodian/host institution)

Accessories / Consumables / Spare parts / Testing modes

Resources

Indian Science Technology and Engineering facilities Map

Indian Science Technology and Engineering facilities Map

Inductively Coupled Plasma Reactive Ion Etching

Equipment Info

Equipment Code : 548410

Make : Sentech

Model : SI500

Institution : Indian Institute of Technology (IIT) Roorkee

Department : Department of Physics

Funding Agency Details : DST, Govt. of India

Pooling of Equipment slot : Yes

AMC End Date (Valid Till) :

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Usage Rate: (as indicated by the custodian/host institution)

Accessories / Consumables / Spare parts / Testing modes

Acknowledgement Statement For Equipment users:

Acknowledgement Statement For Equipment users:

Resources