Equipment Info

Maskless Photolithography with UV Direct Laser Writer

Equipment Info

Equipment Code : 2250224

Make : Durham Magneto Optics

Model : MicroWriter ML3 Pro with dual wavelength Light source

Institution : Indian Institute of Technology (IIT) Bhilai

Department : Central Instrumentation Facility

Funding Agency Details : Institution

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : Used to project or focal-spot write the image pattern onto a chemical resist-coated substrate (e.g. wafer) by means of UV radiation or electron beam. Used in micro fluid, preparation of Nano chip and electronics area. Sample: Solid, Polymer, Gel types sample. Solid, Polymer, Gel types sample.

Usage Rate: (as indicated by the custodian/host institution)


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Maskless Photolithography process

Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available