Equipment Info

Computer Controlled Magnetron Sputter

Equipment Info

Equipment Code : 2353995

Make : APT

Model : APT

Institution : CSIR Advanced Materials and Processes Research Institute (AMPRI) Bhopal

Department : Functional Materials and Composites Division

Funding Agency Details : CSIR

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : Sputtering Chamber: (a) Geometry: spherical chamber with appropriate diameter having good access inside the chamber through door and easy loading of the samples, provision to connect and accessibility with load lock. Sputter up configuration. (b) Material: Electro-polished SS304 grade non-magnetic, non-corrosive stainless steel (c) Base Vacuum rating (Base pressure): The system would be able to achieve a vacuum of better than 1x10-7 torr in a clean and dry atmosphere. Provision will be made to integrate additional TMP in future to reach 1 X 10-8 torr or lower pressure in future (d) Complete sputtering unit would be helium leak tested for leak rate better than 1 X 10-9 torr lit/sec by using Helium, certificated will be provided (e) Flanges/ports: All flanges will be CF and all rotary feedthrough bellow sealed or magnetically coupled. (f) View port: Optical view port for plasma viewing will be provided with shutter to avoid material deposition on the view port. (g) Chamber will ac

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available