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Equipment Info

Plasma Enhanced CVD

Equipment Info

Equipment Code : 2354018

Make : Omicron Scientific

Model : PECVD-0SEC-04-24

Institution : CSIR Advanced Materials and Processes Research Institute (AMPRI) Bhopal

Department : Functional Materials and Composites Division

Funding Agency Details : DST

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : SS Chamber-12?± 0.5 diameter and 10?± 0.5 height (316 type) ? Front door opening for sample loading ? Ports for Pumping, view, gauge, Gas inlet ? Vacuum Pumping System having o Single Sensor: Measuring range 0.99 x 10-3 mbar to 4 ± 0.2 x 10-3 mbar. o Vacuum Valve-1” Dia Quarter swing valve ( it can rotate by 90 degrees and thus control the pumping speed.) o SS Lines(316 type), SS Bellows(316 type), and vacuum fittings ? Substrate Size: 6” Dia (Aluminium bed) ? Substrate Heating Temperature: 24? to 350? ± 5? ? Mass Flow Controllers: 02 Nos. o Argon: 01 No.; 0 to 100 sccm o Nitrogen: 01 No. ; 0 to 100 sccm Acetylene: 01 No. ; 0 to 100 sccm ? Pressure Controller: 01No. (10-1 mbar to 10-3 mbar pressure) ? RF Power Supply 300 Watts with auto matching network: 01 No. Water Chiller: Approx. 1kw ? Mounting Frame, Ancillary Items etc.

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available

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