Equipment Info

RTP CVD Tools

Equipment Info

Equipment Code : 2354022

Make : Venture Scientific

Model : RTP-CVD

Institution : CSIR Advanced Materials and Processes Research Institute (AMPRI) Bhopal

Department : Functional Materials and Composites Division

Funding Agency Details : DST

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : Parameter Properties/Remark Furnace Single zone RTP-CVD furnace Maximum operation temperature) (oC) 1100 oC Working temperature (oC) 1100 oC Heating zone 12-inch length with 140mm constant temperature zone within +/-5ºC uniformity upto 180mm to 200mm. Body Table top tool with suitable metallic frames and wheels for movement Insulation Suitable insulation Heating elements 12 pcs 1.5 kW Halogen light tube, (Dia. =10mm, L=300mm, Heated Length =200mm) Standard working life: 2000 hrs. (depends on heating rate) Heating rate 200-400 oC/min Thermocouple K type or other special grade thermocouple to reach required temperature Temperature controller Proportional–integral–derivative control (PID control) and auto-tune function 8 segments programmed with ramping, cooling and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 5 ºC temperature control accuracy Default PC communication port Operation Both PC operated as well as man

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available