I-STEM Logo
Principal Sciencefic Logo

Equipment Info

CHEMICAL Vapor Deposition system

Equipment Info

Equipment Code : 2354033

Make : Custom

Model : E99144

Institution : CSIR Advanced Materials and Processes Research Institute (AMPRI) Bhopal

Department : Innovative Materials and Processes Division

Funding Agency Details : CSIR

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : a)Maximum working temperature 1100 oC with ± 1 Deg C b)Length of the uniform temperature region should be minimum 100 mm : Quartz tube of size of 500 mm length x 150 mm dai should be provided for the purpose c)The temperature variations in the uniform region should be less than ± 1 Deg C supported by temperature curve as function of length for three temperatures (500, 800, 1100 oC) in steps of < 1 cm d)Furnace able to mount samples of min 4 inch diameter. Quartz substrate holder with sliding mechanism should be provided. e)Rotary pump for achieving 10-3 Torr vacuum or below should be provided f)Bronkorst/MKS Ins. make imported three digital Mass Flow Controllers (MFCs) calibrated for CH4,Ar and H2 with range : 0-200 , ± 1% sccm for CH4 , 0-200 ± 1%sccm for H2 and 50-1000 ± 1% sccm for Ar respectively should be provided g)Readout and programmable digital controller should also be supplied with MFCs h)Pressure controller : Closed-Loop Electronic Pressure Controllers and thrott

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available

The Indian Science, Technology, and Engineering facilities Map (I-STEM) is an interactive web portal designed to accelerate scientific progress in India. This initiative, conceived and supported by the Office of the Principal Scientific Adviser to the Government of India, creates a centralized platform for sharing publicly funded R&D equipment and facilities across various institutions throughout the country.

Resources

 

  • Visitor Hit Counter

 

Copyright © 2026 I-STEM. All rights reserved Hosted at the National Informatics Centre, Delhi, India Audited by: STQC Bengaluru as on 26 Sep 2024