Equipment Info

RF-DC Sputter-Thermal-E Beam Deposition Unit

Equipment Info

Equipment Code : 858609

Make : HHV Advanced Technologies Pvt. Ltd.

Model : Customized

Institution : SATHI Foundation BITS Pilani

Department : SATHI Foundation-BITS Pilani

Funding Agency Details : DST, Govt. of India, BITS Pilani

Pooling of Equipment slot :   Yes

AMC End Date (Valid Till) :  

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PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : Enables high-uniformity deposition of metal, oxide, and nitride thin films using DC and RF sputtering, along with e-beam and thermal evaporation for high-purity thin film formation.

Usage Rate: (as indicated by the custodian/host institution)


Samples External Academic User Internal Academic User Industry User Start-ups National Research Lab User Grassroot innovator
Deposition upto 400 nm
Deposition of Au, Ag, Pt for 400 nm
Deposition above 400 nm
Deposition of Ag, Au, Pt for above 400 nm

Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available