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Equipment Info

Field Emission Scanning Electron Microscope and Energy Dispersive X-ray Spectroscopy

Equipment Info

Equipment Code : 2959342

Make : Carl Ziess and Oxford Instruments

Model : GeminiSEM 360 and UltimMax 100

Institution : Central Manufacturing Technology Institute (CMTI) Bengaluru

Department : Centre for Smart Manufacturer Precision Machine Tools and Aggregates

Funding Agency Details : MHI

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : SEM Specification: FESEM Features : Technology: Field Emission Beam Current: upto 100 nA Beam Stability: < 0.2 % /h Accelerating Voltage: 0.02 - 30 kV, Step - 10 V Resolution: 0.7 ± 0.1 nm @ 15 kV (ISO 24597) Magnification: 8 x to 2000 kx (ISO 16700) Stage: 5 Axes Eucentric, Travel Range: 130 mm X 130 mm X 45 mm Detector/Imaging: Secondary Electron imaging’s (SE2, Inlense) & Backscattered Electron (BSE) Special Features: 3DSM, Large Area Mapping (wafer scale), Scan Speed: 25 ns, Surface Texture Filters (ISO 25178), Roughness/Waviness Filters (ISO 16610) EDS Features: Technology: LN2 free, UltimMax 100, SDD Sensor Area: 100 mm2 Resolution: 122 eV on Mn, 42 eV on C (ISO 15632) Peak shift – Resolution: < 1 eV Count per Seconds: ? 1,30,000 Detection Sensitivity Range: Be (4) to Cf (98) Detection Limit: ? 0.1 wt % on fluorine Analytical Accuracy: ± 2 % Special Features: Large Area Acquisition (Wafer Scale), Multiple Samples, Live Chemical Mapping, Line Scan Applications: Research and

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit ) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available

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