Equipment Info

Magnitron Sputtering System Modle ATS 500

Equipment Info

Equipment Code : 960373

Make : HHV Advanced Technologies Pvt. Ltd.

Model : ATS500

Institution : Indian Institute of Technology (IIT) Kanpur

Department : Materials Science and Engineering

Funding Agency Details : DST, Govt. of India

Pooling of Equipment slot :   No

AMC End Date (Valid Till) :  

PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) :

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) :

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (No document available):

Remarks / Special Instructions (if any):

Description : The ATS 500 Magnetron Sputtering System is a vacuum thin-film deposition system used for coating substrates with thin layers of metals, semiconductors, or dielectric materials. It is widely used in nanotechnology, semiconductor research, optical coatings, and photovoltaic devices. The system support

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit hour) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available