Equipment Info

Physical Vapour Deposition System Automated Electron Beam Evaporation

Equipment Info

Equipment Code : 3663260

Make : HHV (Hind High Vacuum)

Model : ATS 500

Institution : Birla Institute of Technology and Science-Pilani Hyderabad Campus Secunderabad

Department : Mechanical Engineering

Funding Agency Details : DST and Institution

Pooling of Equipment slot :   Yes

AMC End Date (Valid Till) :  

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PRISM Service Category (About PRISM) : D

Pre-Experiment Support (including sample preparation, setup assistance and pre-experimental guidance) : Yes

Post-Experiment Support (including result interpretation, data analysis and post-experimental reporting) : Yes

Equipment Certification (if any) (No document available):

Equipment Calibration (if any) (View) :

Remarks / Special Instructions (if any): Available for internal and external academic/industry users subject to facility approval and slot availability. Minimum booking duration is 5 hours. Usage charges: Internal users – ?500/hour; External academic users – ?1000/hour; Industry users – ?2000/hour.

Description : Automated 6 kW electron beam evaporation system for high-vacuum deposition of metal and dielectric thin films.

Usage Rate: (as indicated by the custodian/host institution)

S.No. Users Category Rate (unit hour) & (In Rupees)
1 Academic (External)*
2 Academic (Internal)***
3 Grassroot innovator
4 Industry User
5 National Research Lab User
6 Startup/MSME User


Accessories / Consumables / Spare parts / Testing modes

Sample Name Sample Type Sample UOM Sample Availability Unit Cost Sample Quantity Sample Description
No Data Available